|1996.0089||Integrated Circuit Engineering Collection|
METHOD OF MAKING INTEGRATED CIRCUIT BY CONTROLLED PROCESS
Glen R. Madland, Phoenix, Arizona, assignor to Motorola, Inc.,
Franklin Park, Ill., a corporation of Illinois
Filed August 15, 1963, Serial Number 302,322
8 Claims (CI. 29 - 25.3)
Sheet 10 of 10
|"...FIG. 20 is the photographic masking pattern used to expose the photo resist emulsion to prepare it as an etching mask in order that portions of the aluminum metalization may be selectively etched away;..."
|"...FIG. 21 is a cross sectional view of the wafer after the aluminum has been etched;..."