METHOD OF MAKING INTEGRATED CIRCUIT BY CONTROLLED PROCESSGlen R. Madland, Phoenix, Arizona, assignor to Motorola, Inc., Franklin Park, Ill., a corporation of Illinois Filed August 15, 1963, Serial Number 302,322 8 Claims (CI. 29 - 25.3) Sheet 2 of 10 |
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| "...FIG. 2 is a silicon wafer which includes a large number of integrated circuits and which has five integral control patterns on it;..." |
| "...FIG. 3 is a photographic masking pattern used with photo resist emulsions to form patterns of acid resistant material on oxidized silicon wafers for selectively etching away regions of the silicon dioxide as a preparation for a selective diffusion step with P type impurity; ..." |
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