|1996.0089||Integrated Circuit Engineering Collection|
METHOD OF MAKING INTEGRATED CIRCUIT BY CONTROLLED PROCESS
Glen R. Madland, Phoenix, Arizona, assignor to Motorola, Inc.,
Franklin Park, Ill., a corporation of Illinois
Filed August 15, 1963, Serial Number 302,322
8 Claims (CI. 29 - 25.3)
Sheet 2 of 10
|"...FIG. 2 is a silicon wafer which includes a large number of integrated circuits and which has five integral control patterns on it;..."
|"...FIG. 3 is a photographic masking pattern used with photo resist emulsions to form patterns of acid resistant material on oxidized silicon wafers for selectively etching away regions of the silicon dioxide as a preparation for a selective diffusion step with P type impurity; ..."