|1996.0089||Integrated Circuit Engineering Collection|
METHOD OF MAKING INTEGRATED CIRCUIT BY CONTROLLED PROCESS
Glen R. Madland, Phoenix, Arizona, assignor to Motorola, Inc.,
Franklin Park, Ill., a corporation of Illinois
Filed August 15, 1963, Serial Number 302,322
8 Claims (CI. 29 - 25.3)
Sheet 3 of 10
|"...FIG. 4 is a plan view of a control pattern portion of the wafer after photographic treatment with the photographic masking pattern of FIG.3 and a subsequent etching operation;..."
|"...FIG. 5 shows the layout or array of individual integrated circuit and control patterns which comprise a photographic masking pattern; ..."