1996.0089 Integrated Circuit Engineering Collection

METHOD OF MAKING INTEGRATED CIRCUIT BY CONTROLLED PROCESS


Glen R. Madland, Phoenix, Arizona, assignor to Motorola, Inc.,
Franklin Park, Ill., a corporation of Illinois
Filed August 15, 1963, Serial Number 302,322
8 Claims (CI. 29 - 25.3)

Sheet 4 of 10




"...FIG. 6 is a cross section of FIG. 4 at line 6-6;..."

"...FIG. 7 is the same view as FIG. 6 but following a solid state diffusion step; ..."

"...FIG. 8 is a portion of another photographic masking pattern for the preperation of the integral control portion of the wafer for a selective etching operation preceding a P type diffusion step; ..."



National Museum of American History


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