1996.0089 Integrated Circuit Engineering Collection

METHOD OF MAKING INTEGRATED CIRCUIT BY CONTROLLED PROCESS


Glen R. Madland, Phoenix, Arizona, assignor to Motorola, Inc.,
Franklin Park, Ill., a corporation of Illinois
Filed August 15, 1963, Serial Number 302,322
8 Claims (CI. 29 - 25.3)

Sheet 5 of 10




"...FIG. 9 is a plan view of the wafer following the selective etching operation in preparation for an N type diffusion step;..."

"...FIG. 10 is a cross section of FIG. 9 at line 10-10; ..."

"...FIG. 11 is the same view as FIG. 10 but after the N type diffusion step has been completed; ..."



National Museum of American History


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