1996.0089 Integrated Circuit Engineering Collection

METHOD OF MAKING INTEGRATED CIRCUIT BY CONTROLLED PROCESS


Glen R. Madland, Phoenix, Arizona, assignor to Motorola, Inc.,
Franklin Park, Ill., a corporation of Illinois
Filed August 15, 1963, Serial Number 302,322
8 Claims (CI. 29 - 25.3)

Sheet 6 of 10




"...FIG. 12 is a portion of the photographic masking pattern used in preparing the wafer etching of silicon dioxide and a subsequent selective diffusion step ;..."

"...FIG. 22 is a completely fabricated integral circuit package;..."



National Museum of American History


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