1996.0089 Integrated Circuit Engineering Collection

METHOD OF MAKING INTEGRATED CIRCUIT BY CONTROLLED PROCESS


Glen R. Madland, Phoenix, Arizona, assignor to Motorola, Inc.,
Franklin Park, Ill., a corporation of Illinois
Filed August 15, 1963, Serial Number 302,322
8 Claims (CI. 29 - 25.3)

Sheet 7 of 10




"...FIG. 13 is a plan view of a control pattern portion of the wafer after photographic treatment with the photographic masking pattern of FIG. 12 and following a subsequent etching operation;..."

"...FIG. 14 is a sectional view of FIG. 13 taken at line 14-14;..."

"...FIG. 15 is the same as FIG. 14 following a final diffusion operation;..."



National Museum of American History


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