|1996.0089||Integrated Circuit Engineering Collection|
METHOD OF MAKING INTEGRATED CIRCUIT BY CONTROLLED PROCESS
Glen R. Madland, Phoenix, Arizona, assignor to Motorola, Inc.,
Franklin Park, Ill., a corporation of Illinois
Filed August 15, 1963, Serial Number 302,322
8 Claims (CI. 29 - 25.3)
Sheet 8 of 10
|"...FIG. 16 is the photographic masking pattern used in the selective oxide etching process in order to prepare the wafer for metalization and provide for ohmic con tacts to the various components;..."
|"...FIG. 23 is a schematic diagram of an integral control circuit suitable for step-stress testing;..."