1996.0089 Integrated Circuit Engineering Collection

METHOD OF MAKING INTEGRATED CIRCUIT BY CONTROLLED PROCESS


Glen R. Madland, Phoenix, Arizona, assignor to Motorola, Inc.,
Franklin Park, Ill., a corporation of Illinois
Filed August 15, 1963, Serial Number 302,322
8 Claims (CI. 29 - 25.3)

Sheet 9 of 10




"...FIG. 17 is the plan view of the wafer after selective oxide removal prior to metalization;..."

"...FIG. 18 is a sectional view of FIG. 17 taken at line 18-18;..."

"...FIG. 19 is the view of FIG. 18 but after aluminum has been evaporated across the surface of the water;..."



National Museum of American History


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