Series 16
Integrated Circuit Engineering Collection
Project Files
Project SOCRATES
Page 14 of 17
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END ITEMS
LOGIC
CRITICAL
TECHNOLOGY
ELEMENTS
LOGIC
KEY COMMODITES
LOGIC
KEY
PARAMETERS
*Maximum
Temperature
Control
Liquid Phase
Epltaxy
OR
a. LPE Reactors
*Maximum
Deposition
Precision
*Maximum
Number
Of
Gates
*Maximum
Deposition
Control
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