Series 16 Integrated Circuit Engineering Collection Project Files

Project SOCRATES Page 14 of 17 Scanned Image

END ITEMSLOGIC  CRITICAL
TECHNOLOGY

ELEMENTS
LOGIC KEY COMMODITESLOGIC  KEY
PARAMETERS

*Maximum
Temperature
Control
  1. Liquid Phase
    Epltaxy
OR a. LPE Reactors
*Maximum
  Deposition
  Precision
*Maximum
  Number
  Of
  Gates
*Maximum
  Deposition
  Control

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