Series 16 Integrated Circuit Engineering Collection Project Files

Project SOCRATES Page 17 of 17 Scanned Image

Project SOCRATES OFFICIAL USE ONLY Page 2

TECHNOLOGY NUMBER: 7.1.1

TECHNOLOGY:      Wafer Preparation Technology

! I.    Substrate Build Up

  • Epitaxially Built Up Wafers
    1. CVD Epitaxy
      1. CVD Epitaxy Reactors
        • Temperature Control
        • Press Control
        • Mass Flow Control
        • Gas Purity
        • Deposition Thickness Control
        • Process Maturity
        • Number Of Deposition Cycles
    2. Molecular Beam Epitaxy
      1. MBE Machines
        • Beam Procision [sic]
        • Temperature Control
        • Deposition Precision
        • Process Maturity
        • Control Of Evaporants
        • Servo Precision
    3. Liquid Phase Epitaxy
      1. Liquid Phase Epitaxy Reactors
        • Deposition Precision
        • Deposition Control
        • Number Of Gates
        • Feature Size

    22 Apr 88 09:09:46 OFFICIAL USE ONLY Outline 7.1.1

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