TECHNOLOGY:      Wafer Preparation Technology

! I.    Substrate Build Up

1. Epitaxially Built Up Wafers
   1. CVD Epitaxy
      1. CVD Epitaxy Reactors
         • Temperature Control
         • Press Control
         • Mass Flow Control
         • Gas Purity
         • Deposition Thickness Control
         • Process Maturity
         • Number Of Deposition Cycles
   2. Molecular Beam Epitaxy
      1. MBE Machines
         • Beam Procision [sic]
         • Temperature Control
         • Deposition Precision
         • Process Maturity
         • Control Of Evaporants
         • Servo Precision
   3. Liquid Phase Epitaxy
      1. Liquid Phase Epitaxy Reactors
         • Deposition Precision
         • Deposition Control
         • Number Of Gates
         • Feature Size
   
   

   22 Apr 88 09:09:46	OFFICIAL USE ONLY	Outline 7.1.1