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United States Patent 3,456,616 July 22, 1969 Vapor Deposition Apparatus Including Orbital Substrate Support Paul S. Gleim Jimmie B. Sherer Filed December 6, 1965 |
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Abstract of the DisclosureThe invention describes an integrated circuit combining semiconductor circuit elements having active regions of the same or opposite type conductivity separated by a semiconductive region over which extends an interconnection on an insulating layer, wherein a highly doped surface region is provided underneath the interconnection to reduce unwanted field-induced leakage currents. In a preferred, the circuit elements are complementary IGFETs. In another embodiment, one of the IGFETs is built into an island surrounded by a thin heavily doped liner |
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Citations [54]:2,586,438 02/1952 Kuebler 3,211,128 10/1965 Potter 2,724,663 11/1955 Bond 3,233,578 02/1966 Capita 2,764,956 10/1956 Burnett 3,286,685 11/1966 Sandmann 3,011,877 12/1961 Schweickert 3,301,213 01/1967 Grochowski 3,128,205 04/1964 Illsley |