PATENT COVER GRAPHIC


United States Patent 3,470,076
September 30, 1969

Method Of Removing Alkali Metal Impurity From An Oxide Coating
Thomas Klein
Keith Harlow Nicholas


Filed January 10, 1967
Image of US PATENT 3,470,076

Abstract of the Disclosure

A method of removing alkali metal ion impurity from an oxide fomed on a semiconductor body is disclosed wherein the body is first heated and then applying a liquid metal which has affinity for alkali metal ions and which does not wet the oxide and applying a voltage across the oxide coating whereby the alkali metal ion impurity is transported to the liquid metal, and then removing the metal with its content of alkali metal ions.
Figure descriptions: cover graphic

  • Figure 1 illustrates the method according to the invention with the use of a drop of liquid metal.
  • Figure 2 illustrates the method according to the invention with the use of a bath of liquid metal.
  • Figure 3 illustrates the method according to the invention with the use of a vertical tube filled with liquid metal.

 Citations [54]:
  
3,303,115 02/1967 Nitsche
National Museum of American History
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