PATENT COVER GRAPHIC

United States Patent 3,472,689
October 14, 1969

Vapor Deposition Of Silicon-Nitrogen Insulating Coatings
Joseph H. Scott

Filed January 19, 1967
Image of US PATENT 3,472,689

Abstract of the Disclosure

A fast-etching coating consisting essentially of silicon and nitrogen is vapor deposited on a substrate, then converted to a slow-etching form.
Figure descriptions: cover graphic

  • Figure 1 is a schematic sectional view of a first form of apparatus useful in the practice of the invention.
  • Figure 2 is a schematic sectional veiw of a second form of apparatus useful in the parctice of the invention. 

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3,170,273  02/1965  Walsh
1,190,308  10/1959  France
3,200,015  08/1965  Kuntz
3,226,194  12/1965  Kuntz
3,328,214  06/1967  Hugle
National Museum of American History
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