PATENT COVER GRAPHIC

United States Patent 3,476,621
November 4, 1969

Impurity Diffusion Source And Method
Frank L. Glitter

Filed March 13, 1967
Image of US PATENT 3,476,621

Abstract of the Disclosure

A source for a donor impurity diffusant for vapor-solid diffusion in the fabrication of semiconductor devices comprises a liquid, antimony III ethoxide.
Figure descriptions: cover graphic

  • a schematic representation of an open tube diffusion apparatus. 

 Citations [54]:
  
3,001,896  09/1961  Marinace
National Museum of American History
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