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United States Patent 3,477,885 November 11, 1969 Method For Producing A Structure Composed Of Mutually Insulated Semiconductor Regions For Integrated Circuits Heinz Henker Filed March 18, 1966 |
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Abstract of the DisclosureMethod of producing a structure composed of mutually insulated semiconductor regions for integrated circuits, which comprises placing a plurality of semiconductor bodies besides one another in face-to-face contact upon a heat-resistant support, said bodies having an insulating coating at least on the entire surface not contacting the support; then depositing a crystalline material upon the semiconductor bodies and the support while preserving said insulating coating and thereby completely embedding said semiconductor bodies and bonding them together to a single integral structure; and thereafter separating said structure from said support. |
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Citations [54]:3,332,137 07/1967 Kenny 3,343,255 09/1967 Donovan 3,381,182 04/1968 Thorton |