Abstract of the Disclosure

A silicate glass coating is synthesized by chemical vapor phase reaction on the surface of an object by heating the object to a temperature in the range of 300° C. to 600° C. in an atmosphere consisting of a mixture of an inert carrier gas, silane (SiH₄) as a source of silicon for silicon dioxide, other hydrides and/or alkyls as sources of ions for secondary oxides, and oxygen. For example, a borosilicate glass consisting of a mixture of silicon dioxide (SiO₂) and boron trioxide (B₂O₃) is synthesized from silane and diborane (B₂H₆), by oxidation of these hydrides at elevated temperature.

• a typical apparatus suitable for carrying out the present method.

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