PATENT COVER GRAPHIC


United States Patent 3,490,963
January 20, 1970

Production Of Planar Semiconductor Devices By Masking And Diffusion
John L. Sprague

Filed May 18, 1964
Image of US PATENT 3,490,963

Abstract of the Disclosure

This invention relates to a process for producing semiconductor devices of planar configuration, and more particularly to improvement of the process for producing junctions and contacts in a planar semiconductor device.
Figure descriptions: cover graphic

  • Figure 1 is a sectional view through a semiconductor body at an intermediate stage of manufacture of a planar device in accordance with the present invention.
  • Figure 2 is a sectional view through a semiconductor body at a further stage of manufacture showing three zones and two rectifying junctions of a planar configuration.
  • Figure 3 is a sectional view of the body of Figure 2 having an insulating coating on a common planar surface.
  • Figure 4 is a sectional view through the body of Figure 3 with etch holes in the insulating coating at each of the respective zones.
  • Figure 5 is a sectional view through the body of Figure 4 with contacts applied to the respective zones in the etched holes and conductive leads overlying the insulating coating.

 Citations [54]:
  
2,953,486 09/1960 Atalla 3,200,019 08/1965 Scott 3,085,033 04/1963 Handelman 3,245,848 04/1966 DeVaux 3,147,152 09/1964 Mendel 3,281,915 11/1966 Leistiko 3,165,430 01/1965 Hugle 3,197,681 07/1965 Broussard 3,184,823 05/1965 Little
National Museum of American History
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