PATENT COVER GRAPHIC


United States Patent 3,535,775
October 27, 1970

Formation Of Small Semiconductor Structures
Marvin Garfinkel
William E. Engeler


Filed December 18, 1967
Image of US PATENT 3,535,775

Abstract of the Disclosure

Fabrication of extremely small semiconductor devices is achieved by irradiating with fission fragments a semiconductor wafer substrate, such as silicon, coated with a layer of an insulator, such as silicon dioxide, applying a protective photoresist layer over predetermined regions of the silicon dioxide, and thereafter etching narrow diameter holes in the silicon dioxide through to the substrate in the unprotected regions along the path of the fission fragments. Metal contacts may then be evaporated into the holes to form Schottky diodes, or additional silicon may be grown epitaxially through the holes. Additionally, conductivity type determining impurities may be diffused into the substrate through holes in the silicon dioxide layer. Contact to the resulting devices is then made by metallizing the wafer in the predetermined regions.
Figure descriptions: cover graphic

  • Figure 1 illustrates a semiconductor wafer coated with an insulating layer and undergoing heavy nuclear particle irradiation.
  • Figure 2 illustrates the semiconductor wafer of Figure 1 with an etch mask coated over the insulating layer.
  • Figure 3 illustrates the semiconductor wafer of Figures 1 and 2 after the insulating layer has undergone etching.
  • Figure 4 illustrates a semiconductor wafer coated with an insulating layer and an irradiation shield, undergoing heavy nuclear particle irradiation.
  • Figure 5 illustrates the semiconductor wafer of Figure 4 after the insulating layer has undergone etching.
  • Figures 6A-6C illustrate devices wherein contact is made to the semiconductor wafer through the small holes etched in the insulating layer.

 Citations [54]:
  
2,588,254 03/1952 Lark-Horovitz et al 2,787,564 04/1957 Shockley 2,817,613 12/1957 Mueller 3,303,085 02/1967 Price et al
National Museum of American History
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