| PATENT COVER GRAPHIC |
|
United States Patent 4,149,177 April 10, 1979 Method Of Fabricating Cinductive Buried Regions In Integrated Circuits And The Resulting Structures Martin J. Alter Filed September 3, 1976 |
![]() |
Abstract of the DisclosureIn an oxide isolated semiconductor structure having an epitaxial layer formed on a monocrystalline substrate, a buried, laterally extending, PN junction in said structure, and oxidized isolation regions extending through said epitaxial layer to said PN junction, thereby to form a plurality of electrically isolated pockets of semiconductor material, a dopant is located in those regions of the semiconductor material directly adjacent the oxidized isolation regions. This dopant is often referred to as the field predeposition. |
| Figure descriptions: cover graphic |
|
Citations [54]:3,648,125 03/1972 Peltzer 3,975,752 08/1976 Nicolay |