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United States Patent 4,202,006 May 6, 1980 Semiconductor Integrated Circuit Device Heshmat Khajezadeh Filed May 21, 1979 |
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Abstract of the DisclosureA semiconductor integrated circuit device includes circuit elements having relatively different performance characteristics in which buried regions having different chemical elements are used to autodope an epitaxial layer to different degrees. |
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Citations [54]:3,759,760 09/1973 Encinas 3,846,192 11/1974 Murrmann 3,961,340 06/1976 Encinas 4,087,900 05/1978 Yiannonlos |