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United States Patent 4,213,139 July 15, 1980 Double Level Polysilicon Series Transistor Cell G. R. Mohan Rao Filed May 18, 1978 |
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Abstract of the DisclosureA pair of MOS transistors are formed as an integrated semiconductor device, sharing a common source/drain region which is created by the edges of inverted regions beneath the gates of the transistors. These gates are first and second level polysilicon, with the second partly overlapping the first. On the opposite ends, the source and drain regions are formed by diffusion using the oxide under the first and second level poly as the diffusion mask |
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Citations [54]:4,084,108 04/1978 Fujimoto 4,099,196 04/1978 Simko |