PATENT COVER GRAPHIC |
United States Patent 3,468,729 September 23, 1969 Method Of Making A Semiconductor By Oxidizing And Simultaneous Diffusion Of Impurities Having Different Rates Of Diffusivity Walter C. Benzing Filed March 21, 1966 |
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Abstract of the DisclosureThis invention relates to a method of making a semiconductor. A base semiconductor of "n" conductivity is selected and masked with an oxide coat on both sides of the semiconductor wafer. The oxide is removed from portions on opposite sides of the semiconductor. The oxide-removed surfaces do not overlap. The semiconductor is subjected to a diffusion environment wherein "p" and "n" or both simultaneously diffused into the wafer with the "p" impurity diffusing at a faster rate than the "n" impurity. The diffusion step produces a semiconductor material having four separate zones of differing conductivities in the semiconductor. |
Figure descriptions: cover graphic |
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Citations [54]:3,368,113 02/1968 Shaunfield 3,381,182 04/1968 Thornton |
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