PATENT COVER GRAPHIC

United States Patent 3,473,980
October 21, 1969

Significant Impurity Sources For Solid State Diffusion
William E. Beadle
Kenneth E. Benson

Filed October 11, 1966
Image of US PATENT 3,473,980

Abstract of the Disclosure

A highly controllable source material for producing shallow phosphorus diffused zones in silicon semiconductor bodies comprises a ternary solid solution of 58% germanium, 6% silicon and 36% phosphorus by weight.
Figure descriptions: cover graphic

  • an apparatus for practicing the method in accordance with this invention. 

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2,868,678  01/1959  Shockley
3,279,954  Month/Year  Cody
2,997,410  08/1961  Selikson
3,118,094  01/1964  Cornelison
3,154,446  10/1964  Jones
National Museum of American History
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