United States Patent 3,476,621
November 4, 1969

Impurity Diffusion Source And Method
Frank L. Glitter

Filed March 13, 1967
Image of US PATENT 3,476,621

Abstract of the Disclosure

A source for a donor impurity diffusant for vapor-solid diffusion in the fabrication of semiconductor devices comprises a liquid, antimony III ethoxide.
Figure descriptions: cover graphic

  • a schematic representation of an open tube diffusion apparatus.

 Citations [54]:
3,001,896 09/1961 Marinace
National Museum of American History
HomeSearchChip TalkChip FunPatentsPeoplePicturesCreditsCopyrightComments