Abstract of the Disclosure

Conductive contacts are extended through an overlying protective coating of an electronic device without opening of the coating, bu ion implantation in which ion penetration is varied through the coating thickness to form a conductive path from the device to the outer surface of the coating.

• Figure 1 is a view in section of a semiconductor device showing its active regions and a protective surface coating.
• Figure 2 is a view in section of the device of Figure 1 showing conductive contacts extended through the coating to the active regions.
• Figure 3 is a view in section of the device of Figure 2 illustrating completed contacts.

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