United States Patent 3,481,776
December 2, 1969

Ion Implantation To Form Conductive Contact
Kenneth E. Manchester

Filed July 18, 1966
Image of US PATENT 3,481,776

Abstract of the Disclosure

Conductive contacts are extended through an overlying protective coating of an electronic device without opening of the coating, bu ion implantation in which ion penetration is varied through the coating thickness to form a conductive path from the device to the outer surface of the coating.
Figure descriptions: cover graphic

  • Figure 1 is a view in section of a semiconductor device showing its active regions and a protective surface coating.
  • Figure 2 is a view in section of the device of Figure 1 showing conductive contacts extended through the coating to the active regions.
  • Figure 3 is a view in section of the device of Figure 2 illustrating completed contacts.

 Citations [54]:
3,019,137 01/1962 Hawlet 3,396,052 08/1968 Rand 3,117,832 01/1964 Sterling 3,228,812 01/1966 Blake 3,306,763 02/1967 Peterson 3,330,694 07/1967 Black
National Museum of American History
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