PATENT COVER GRAPHIC

United States Patent 3,494,809
February 10, 1970

Semiconductor Processing
Carl A. Ross

Filed June 5, 1967
Image of US PATENT 3,494,809

Abstract of the Disclosure

Protection of the back side of a semiconductor wafer is provided by the use of a deposit of silicon nitride thereon during diffusion of active regions in the opposite side of the semiconductor wafer through an oxide mask.
Figure descriptions: cover graphic

  • Figures 1 through 4 are sectional views of a sequence in the preparation of integrated circuit components utilizing the present invention. 

 Citations [54]:
  
3,321,340  05/1967  Murphy
3,373,051  03/1968  Chu
3,421,936  01/1969  Vogel
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