United States Patent 3,556,879
January 19, 1971

Method Of Treating Semiconductor Devices.
Alfred Mayer

Filed March 20, 1968
Image of US PATENT 3,556,879

Abstract of the Disclosure

The stability and minority carrier lifetime of a device comprising a semiconductor body covered by an insulating layer is improved by subjecting the insulating layer to an atmosphere including hydrogen chloride, while heating the device, so that a gradient is established for out-diffusion of certain deleterious metals from the device.
Figure descriptions: cover graphic

  • apparatus useful in practicing a preferred embodiment of the process described herein.

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2,953,486 09/1960 Atalla 3,243,323 03/1966 Corrigan et al 3,007,820 11/1961 McNamara 3,085,033 04/1963 Handelman 3,162,557 12/1964 Brock et al 3,183,128 05/1965 Leistiko, Jr. et al
National Museum of American History
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