PATENT COVER GRAPHIC |
United States Patent 3,560,810 February 2, 1971 Field Effect Transistor Having Passivated Gate Insulator Pieter Balk David W. Dong Jerome M. Eldridge Filed August 15, 1968 |
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Abstract of the DisclosureAn insulated-gate field effect transistor is described which includes a gate insulator defined as a laminate structure comprising a phosphosilicate glass (PSG) layer and a silicon dioxide (SiO2) layer, the ratio of the thicknesses of such layers and, also, the P2O5 concentration in the PSG layer being properly chosen to insure stable device characteristics over extended periods under operation conditions. |
Figure descriptions: cover graphic |
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Citations [54]:3,334,281 08/1967 Ditrick 3,476,619 11/1969 Tolliver |
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