PATENT COVER GRAPHIC |
United States Patent 4,212,684 July 15, 1980 CISFET Processing Including Simultaneous Doping Of Silicon Components And FET Channels Ronald W. Brower Filed November 20, 1978 |
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Abstract of the DisclosureA process for forming a CIS (conductor-insulator-semi-conductor) integrated circuit having one or more field-effect memory transistors, and one or more polysilicon resistors and/or polysilicon conductors. The polysilicon components are formed to predetermined sizes, as needed, so that the implant used to establish the memory threshold voltage of the transistor also provides the desired polysilicon resistance value(s). The process may be used to simultaneously form both memory and non-memory transistors |
Figure descriptions: cover graphic |
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Citations [54]:3,750,268 08/1973 Wang 4,075,045 02/1978 Rideout 3,868,274 02/1975 Hubar et al 4,080,718 03/1978 Richman 3,889,358 06/1975 Bierhenke 4,095,251 06/1978 Dennard 3,897,282 07/1975 White 4,101,921 07/1978 Shimada et al 3,996,657 12/1976 Simko et al 4,104,784 08/1978 Klein 4,041,522 08/1977 Oguey et al 4,110,776 08/1978 Rao et al 4,074,301 02/1978 Paivinen et al |
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